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Florian Solzbacher, Ph.D.


The Nano Institute of Utah

Co-Director, Nano Institute of Utah; Director, Center for Engineering Innovation; Professor, MEMS, Microsensors, and Actuators, Department of Electrical & Computer Engineering; Adjunct Associate Professor, Departments of Materials Science & Engineering and Bioengineering

Integrated Neural Interface Program

Nano and Microfabrication Laboratory

office: 801-585-6331
office: 801-581-7408
fax: 801-581-3601

Mailing Address:
Merrill Engineering Building 50 S Central Campus Dr Rm 3116 Salt Lake City, UT 84112

Besides working as a general MEMS service provider for on and off campus partners, Florian Solzbacher’s core focus in research is in Harsh Environment MEMS, i.e. materials (SiC [on Si], SOI, GaN), metallisation systems for high temperatures and aggressive ambient conditions, and silicon fusion bonding and packaging issues. The current objective is to team up with industrial partners who will set the specifications and test conditions (and carry out some of the tests) while working towards a better understanding and subsequently better properties on materials together with partners in the USA and Europe.


Last Updated: 8/16/21