Micro & Nano Systems Integration Cluster - Publications

Patent

K. Najafi, H. Kim, L. Bernal, A. Astle, and P. Washabaugh, “Micropump assembly for a micro gas chromatograph and the like,” US patent, No. 7,008,193 B2, March 2006.

Book Chapters

H. Kim, K. Najafi, and L. Bernal (2008), "Gas Micropumps." In: Yogesh Gianchandani, Osamu Tabata, and Hans Zappe (Editors in Chief), Comprehensive Microsystems, Vol. 2, pp. 273-300. Amsterdam: Elsevier.

K. Najafi, T. Harpster, H. Kim, J. Mitchell, and W. Welch (2008), "Wafer Bonding." In: Yogesh Gianchandani, Osamu Tabata, and Hans Zappe (Editors in Chief), Comprehensive Microsystems, Vol. 1, pp. 235-270. Amsterdam: Elsevier.

Journal Articles

A.J. Gross, G.-S. Hwang, B. Huang, H.-X. Yang, N. Ghafouri, H.Kim, R.L. Peterson, C. Uher, M. Kaviany, and K. Najafi, "Multistage planar thermoelectric microcoolers,"IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), accepted for publication, 2011.

T. Galchev, H. Kim, and K. Najafi, "The design and implementation of a micro power generator for harvesting low-frequency and non-periodic vibrations," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), accepted for publication, 2011.

H. Kim, K. Najafi, and L.P. Bernal, "Helmholtz Resonance Based Micro Electrostatic Actuators for Compressible Gas Control: a Microjet Generator and a Gas Micro Pump," Journal of Microelectronics and Electronic Packaging, Vol. 7, No. 1, pp. 1-9, First Quarter 2010.

B. Huang, C. Lawrence, A. Gross, G. Hwang, N. Ghafouri, S. Lee, H. Kim, C. Li, C. Uher, K. Najafi, and M. Kaviany, "Low-temperature characterization and micro patterning of co-evaporated Bi2Te3/Sb2Te3 Films," accepted in the Journal of Applied Physics (JAP), October, 2008.

G. Hwang, A. Gross, H. Kim, S. Lee, N. Ghafouri, B. Huang, C. Lawrence, C. Uher, K. Najafi, and M. Kaviany, "Micro Thermoelectric Cooler: Planar Multistage," accepted and to appear in the IEEE Journal of Heat and Mass Transfer (JHMT), Elsevier, June, 2008.

H. Kim and K. Najafi, "Characterization of aligned wafer-level transfer of thin and flexible Parylene membranes," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 16, No. 6, pp. 1386-1396, December 2007.

A. Astle, H. Kim, L. Bernal, K. Najafi, and P. Washabaugh, "Theoretical and experimental performance of a high frequency gas micropump," Sensors and Actuators A: Physics (SNA), Vol. 134, No. 1, pp. 245-256, February 2007.

H. Kim and K. Najafi, "Characterization of low-temperature wafer bonding using thin film Parylene," IEEE/ASME Journal of Microelectromechanical Systems (JMEMS), Vol. 14, No. 6, pp. 1347-1355, December 2005.

G. Nam*, S. Lee*, J. Chae*, H. Kim*, and A. Drake, "Hybrid two-dimensional position detection system using MEMS accelerometer," IEEE Transactions on Very Large Scale Integration (TVLSI) Systems, Vol. 13, No. 10, pp. 1167-1178, October 2005. (* equally contributed.)

Conference Articles (Refereed)

[It is noteworthy that the following Conferences of (1) Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head), (2) Int. Conf. on Micro Electro Mechanical Systems (MEMS), and (3) Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers) are one of the most highly-regarded conference publication in the area of Microsystems and MEMS. The acceptance rate is typically below 35% down to 10%.]

R. Booth and H. Kim, "A multi-layered microfluidic device for in vitro blood brain barrier permeability studies," accepted for the Proc. 15th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '11), Seattle, WA, Oct. 2-6, 2011.

H.T. Kim, A.T. Evans, and H. Kim, "A rapid-prototyped on-chip vacuum gauge utilizing the volumetric expansion of trapped air in a sealed microchamber," accepted for the Proc. 15th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '11), Seattle, WA, Oct. 2-6, 2011.

H.T. Kim, J.W. Park, and H. Kim, "All electrical peristaltic vacuum pump utilizing electromagnetic and hydraulic actuation with a highly flexible membrane," accepted for the Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '11), Beijing, China, Jun. 5-9, 2011, pp. 2454-2457.

J. Yang, H.T. Kim, J.W. Park, and H. Kim, "Cyclodextrin-based micro neurotransmitter sensor for selective catecholamine hormone detection," accepted for the Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '11), Beijing, China, Jun. 5-9, 2011, pp. 2102-2105.

J.W. Park, J. Yang, and H. Kim, "Electromagnetically-driven high-pressure hydraulic actuators for pneumatic-free large-scale microfluidic manipulation," in Proc. 24th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, Jan. 23-27, 2011, pp. 1209-1212.

J. Yang, J.W. Park, and H. Kim, "Simultaneous detection of catecholamine neurotransmitters utilizing a cyclodextrin-based micro electrode array," accepted for the Proc. 14th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '10), Groningen, Netherland, Oct. 3-7, 2010, pp. 599-601.

J.W. Park and H. Kim, "High aspect ratio three-dimensional electroplating by localized laser irradiation," in Proc. 5th Annual IEEE Intern. Conf. on Nano/Micro Engineered and Molecular Systems (NEMS '10), Xiamen, China, Jan. 20-23, 2010.

T. Galchev, E. Aktakka, H. Kim, and K. Najafi, "A piezoelectric frequency-increased power genertor for scavenging low-frequency ambient vibration," in Proc. 23rd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '10), Hong Kong, Jan. 24-28, 2010, pp. 1203-1206.

M. Sadeghi, H. Kim, and K. Najafi, "Electrically-Driven Micro Hydraulic Actuator Arrays," in Proc. 23rd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '10), Hong Kong, Jan. 24-28, 2010, pp. 15-18.

T. Galchev, H. Kim, and K. Najafi, "A parametric frequency increased power generator for scavenging low-frequency ambient vibrations," in Proc. 23rd International Conference Euro-Sensors (Eurosensors '09), Lausanne, Switzerland, Sept. 6-9, 2009, pp. 1439-1442.

T. Galchev, H. Kim, and K. Najafi, "Non-resonant bi-stable frequency-increased power scavenger from low-frequency ambient vibration," accepted for in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '09), Denver, Colorado, Jun. 21-25, 2009, pp. 632-635.

E. Aktakka, H. Kim, and K. Najafi, "Wafer-level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substrates," accepted for in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '09), Denver, Colorado, Jun. 21-25, 2009, pp. 849-852.

S. Lee, S. Yee, A. Besharatian, H. Kim, and K. Najafi, "Adaptive gas pumping by controlled timing of active microvalves in peristaltic micropumps," accepted for in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '09), Denver, Colorado, Jun. 21-25, 2009, pp. 2294-2297.

A. Gross, B. Huang, G. Hwang, L. Yang, N. Ghafouri, H. Kim, C. Uher, M. Kaviany, and K. Najafi, "High-performance micro scale thermoelectric cooler: An optimized 6-stage cooler," accepted for in Proc. 15th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '09), Denver, Colorado, Jun. 21-25, 2009, pp. 2413-2416.

H. Kim and K. Najafi, "An electrically-driven, large-deflection, high-force micro piston hydraulic actuator array for large-scale micro fluidic systems," in Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '09), Sorrento, Italy, 2009, pp. 483-486.

N. Ghafouri, H. Kim, M. Atashbar, and K. Najafi, "A micro thermoelectric energy scavenger for a hybrid insect," accepted to in Proc. 7nd IEEE International Conference on Sensors (Sensors '08), Lecce, Italy, Oct. 26-29, 2008.

H. Kim and K. Najafi, "Electrostatic hydraulic three-way gas microvalve for high-pressure applications," in Proc. 12th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '08), San Diego, CA, Oct. 12-16, 2008, pp. 379-381.

D. Egert, H. Kim, and K. Najafi, "Characterization of Parylene bonding for vacuum packaging," in Proc. 22nd International Conference Euro-Sensors (Eurosensors '08), Dresden, Germany, Sept. 7-10, 2008.

E. Romero, T. Galchev, E. Aktakka, N. Ghafouri, H. Kim, M. Neuman, K. Najafi, and R. Warrington, "Micro energy harvesters," in Proc. International Conference on Commercialization of Micro and Nano Systems (COMS '08), Puerto Vallarta, Mexico, Aug. 31- Sept. 4, 2008: Best Paper Award.

E. Aktakka, H. Kim, M. Atashbar, and K. Najafi, "Mechanical energy scavenging from a flying insect," in Proc. 13th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '08), Hilton Head Island, SC, Jun. 1-5, 2008, pp. 382-383.

A. Gross, B. Huang, G. Hwang, C. Lawrence, N. Ghafouri, H. Kim, C. Uher, M. Kaviany, and K. Najafi, "A multi-stage in-plane micro-thermoelectric cooler," in Proc. 21st Int. Conf. on Micro Electro Mechanical Systems (MEMS '08), Tucson,Arizona, Jan. 13-17, 2008, pp. 840-843.

H. Kim, S. Lee, and K. Najafi, "High-force liquid-gap electrostatic hydraulic micro actuators," in Proc. 11th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '07), Paris, France, Oct. 7-11, 2007, pp. 1735-1737.

H. Kim, W. Steinecker, S. Reidy, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, P. Washabaugh, and K. Wise, "Micropump-driven high-speed MEMS gas chromatography system," in Proc. 14th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '07), Lyon, France, Jun. 10-14, 2007, pp. 1505-1508.

E. Zellers, S. Reidy, R. Veeneman, R. Gordenker, W. Steinecker, G. Lambertus, H. Kim, J. Potkay, M. Rowe, Q. Zhong, C. Avery, H. Chan, R. Sacks, K. Najafi, and K. Wise, "An integrated micro analytical-system for complex vapor mixtures," in Proc. 14th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers 07), Lyon, France, Jun. 10-14, 2007, pp. 1491-1496.

E. Zellers, W. Steinecker, M. Rowe, G. Lambertus, S. Reidy, J. Potkay, H. Kim, C. Avery, H. Chan, R. Sacks, K. Najafi, L. Bernal, and K. Wise, "A MEMS Gas Chromatograph for Determinations of Toxic Industrial Chemical Mixtures," in Proc. Pittsburgh Conference on Analytical Chemistry and Applied Spectroscopy (Pittcon '07), Chicago, IL, Feb. 25- Mar. 2, 2007.

H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, "A fully integrated high-efficiency peristaltic 18-stage gas micropump with active microvalves," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '07), Kobe, Japan, Jan. 21-25, 2007, pp. 131-134.

H. Kim, A. Jaregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, "Low-power electrostatic microthruster for propulsion based on Helmholtz-resonance," in Proc. 20th IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS '07), Kobe, Japan, Jan. 21-25, 2007, pp. 127-130.

H. Kim, W. Steinecker, G. Lambertus, A. Astle, K. Najafi, E. Zellers, L. Bernal, and K. Wise, "Integrated high-pressure 4-stage micro gas pump for high-speed micro gas chromatography," in Proc. 10th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '06), Tokyo, Japan, Nov. 5-9, 2006, pp. 1037-1039.

H. Kim, A. Astle, L. Bernal, K. Najafi, and P. Washabaugh, "Directional pumping performance of an electrostatic checkerboard microvalve," in Proc. 2006 ASME Int. Mechanical Engineering Congress & Exposition (ASME '06), Chicago, IL, Nov. 5-10, 2006, IMECE 2006-16211 .

H. Kim, A. Astle, K. Najafi, L. Bernal, and P. Washabaugh, "Integrated Peristaltic 18-Stage Electrostatic Gas Micro Pump with Active Microvalves," in Proc. 12th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '06), Hilton Head Island, SC, Jun. 4-8, 2006, pp. 292-295.

H. Kim, A. Jauregui, C. Morrison, K. Najafi, L. Bernal, and P. Washabaugh, "Low-Power Electrostatic Helmholtz-Resonance Microjet Generator for Propulsion and Cooling," in Proc. 12th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '06), Hilton Head Island, SC, Jun. 4-8, 2006, pp. 296-299.

A. Astle, L. Bernal, P. Washabaugh, H. Kim, and K. Najafi, "Theoretical and experimental performance of a high frequency micro pump," in Proc. 2005 ASME Int. Mechanical Engineering Congress & Exposition (ASME '05), Orlando, FL, Nov. 5-11, 2005, IMECE 2005-81626.

H. Kim, A. Astle, K. Najafi, L. Bernal, P. Washabaugh, and F. Cheng, "Bi-directional electrostatic microspeaker with two large-deflection flexible membranes actuated by single/dual electrodes," in Proc. 4th IEEE Conf. on Sensors (Sensors '05), Irvine, CA, Oct. 31-Nov. 3, 2005, pp. 89-92.

H. Kim, K. Najafi, A. Astle, L. Bernal, and P. Washabaugh, "Fabrication and performance of a dual-electrode electrostatic peristaltic gas micropump," in Proc. 9th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (µTAS '05), Boston, MA, Oct. 9-13, 2005, pp. 1173-1176.

H. Kim and K. Najafi, "Characterization of Parylene-assisted wafer bonding: Long-term stability and influence of process chemicals," in Proc. 13th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '05), Seoul, Korea, Jun. 5-9, 2005, pp. 2015-2018.

E. Zellers, W. Steinecker, G. Lambertus, M. Agah, C. Lu, H. Chan, J. Potkay, M. Oborny, J. Nichols, A. Astle, H. Kim, M. Rowe, J. Kim, L. da Silva, J. Zheng, J. Whiting, R. Sacks, S. Pang, M. Kaviany, P. Bergstrom, A. Matzger, C. Kurdak, L. Bernal, K. Najafi, and K. Wise, "A Versatile MEMS Gas Chromatograph for Determinations of Environmental Vapor Mixtures," in Proc. 11th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, Jun. 6-10, 2004, pp. 61-66.

H. Kim, A. Ucok, and K. Najafi, "Large-Deflection Stacked Mult-Electrode Electrostatic Actuator," in Proc. 11th Solid-State Sensor, Actuator, and Microsystems Workshop (Hilton Head '04), Hilton Head Island, SC, Jun. 6-10, 2004, pp. 340-343.

A. Astle, L. Bernal, P. Washabaugh, H. Kim, and K. Najafi, "Dynamic Modeling and Design of a High Frequency Micro Vacuum Pump," in Proc. 2003 ASME Int. Mechanical Engineering Congress & Exposition (ASME '03), Washington D.C., USA, Nov. 15-21, 2003, IMECE 2003-41493.

H. Kim and K. Najafi, "Wafer Bonding Using Parylene and Wafer-Level Transfer Of Free-Standing Parylene Membranes," in Proc. 12th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '03), Boston, MA, Jun. 8-12, 2003, pp. 790-793.

H. Kim, K. Najafi, P. Washabaugh, and L. Bernal, "Large-Deflection Out-Of-Plane Electrostatic Buckled-Electrode Actuators," in Proc. 12th Int. Conf. on Solid-State Sensors, Actuators, and Microsystems (Transducers '03), Boston, MA, Jun. 8-12, 2003, pp. 794-797.

M. Muller, L. Bernal, P. Washabaugh, H. Kim, and K. Najafi, "Resonance Effects of Electrostatically Actuated Acoustic Jets," in Proc. 41st Aerospace Sciences Meeting and Exhibit, Reno, NV, Jan. 6-9, 2003, AIAA 2003-1272.

M. Muller, L. Bernal, P. Washabaugh, T.-K. Chou, H. Kim, and K. Najafi, "Acoustically Generated Jet Arrays for Micropropulsion Applications," in Proc. 2002 ASME Int. Mechanical Engineering Congress & Exposition (ASME '02), New Orleans, LA, Nov. 17-22, 2002, IMECE 2002-33630.

A. Astle, A. Paige, L. Bernal, J. Munfakh, H. Kim, and K. Najafi, "Analysis and Design of Multistage Electrostatically-Actuated Micro Vacuum Pumps," in Proc. 2002 ASME Int. Mechanical Engineering Congress & Exposition (ASME '02), New Orleans, LA, Nov. 17-22, 2002, IMECE 2002-39308.

G. Nam*, S. Lee*, J. Chae*, and H. Kim*, "Two-Dimensional Position Detecting System using MEMS Accelerometer for MOUSE Application," in Proc. 38th Design Automation Conference (DAC '01), Las Vegas, NV, June 18-21, 2001, pp. 852-857. (* equally-contributed): Best Paper Award.

Non-Refereed Conference Abstracts and Presentations

H. Kim, K. Najafi, and J.W. Park, "Micro hydraulic piston arrays for hydraulic actuator array for pneumatic-less portable large-scale microfluidic systems," in Proc. 5th Conf. of NanoUtah (NANO UTAH '09), Salt Lake City, Utah, 2009.

Lab Contact Information

MEB 50 S Central Campus Dr. Rm. 4108
Salt Lake City, UT 84112
Phone: 801-587-9497
E-mail
 
Last Updated: 3/14/13