Micro & Nano Systems Integration Cluster - News

• "ICO Prize goes to Rajesh Menon for nanolithography," Newsletter of the International Commission for Optics, January 1, 2010. Web: http://www.ico-optics.org/ico_jan10.html#Menon
• "USTAR researcher wins prestigious international prize for nanotechnology breakthrough," innovationUtah news. Web: http://newmedia.innovationutah.com/2010/01/22/ustar-researcher-wins-prestigious-international-prize-for-nanotechnology-breakthrough/
• Michael O'Malley, "USTAR researcher wins prestigious international prize for nanotechnology breakthrough," UtahPulse.com news. Web: http://utahpulse.com/featured_article/ustar-researcher-wins-prestigious-international-prize-nanotechnology-breakthrough/
• D. Chandler, "It's a fine line. New method could lead to narrower patterns," MIT Press release, April 9, 2009. Web: http://web.mit.edu/newsoffice/2009/nanopatterning-0409.html
• R. Ehrenberg, "Double-laser approach makes one thin line," ScienceNews, April 10, 2009. Web: http://www.sciencenews.org/view/generic/id/42679
• P. Rodgers, "What diffraction limit?," Nature Nanotechnology, Vol. 4, p. 280, May 2009.
• Saswato Das, "Two-laser lithography shrinks transistors," IEEE Spectrum, June 2009. Web: http://www.spectrum.ieee.org/semiconductors/devices/twolaser-lithography-shrinks-transistors-on-the-cheap
• J. Timmer, "Using donut-shaped lasers to make smaller CPUs," Ars-Technica, April 10, 2009. Web: http://arstechnica.com/science/news/2009/04/overcoming-the-wavelength-limits-of-photolithography.ars
• S. Deffree, "MIT patterning method could aid scaling," EDN, April 13, 2009. Web: http://www.edn.com/article/CA6651210.html
• "MIT makes 36nm lines with intereference litho step," Solid State Technology, April 13, 2009.

Lab Contact Information

36 S. Wasatch Drive
Salt Lake City, UT 84112
Phone: 801-587-1566
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