Wireless Nanosystems Cluster -
Mastrangelo Lab - Publications

Publications

"Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films," Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, J. Appl. Phys. 63 (5), pp. 1442-1447, March 1, 1988, and 66 (7), pp. 3420, Oct. 1, 1989.

"Thermal diffusivity of heavily doped low pressure chemical vapor deposited polycrystalline silicon films," C. H. Mastrangelo and R. S. Muller, Sensors and Materials. Vol. 3, p. 133-137, 1988.

"Thermophysical properties of low-residual stress, silicon-rich, LPCVD silicon nitride films," C. H. Mastrangelo, Y. C. Tai, and R. S. Muller, Sensors and Actuators, Vol. 23(A), p. 856-860, 1990.

"Microfabricated incandescent lamps," C. H. Mastrangelo, R. S. Muller, and S. Kumar, Applied Optics, Vol. 30, pp. 868-872, 1991.

"Microfabricated thermal absolute -pressure sensor with on-chip digital front-end processor," C. H. Mastrangelo and R. S. Muller, Invited paper to the IEEE Journal of Solid-State Circuits, Vol. 26, pp. 1998-2007, Dec. 1991.

"Electrical and optical characteristics of vacuum-sealed polysilicon microlamps," C. H. Mastrangelo, H.-J. Hyeh and R. S. Muller, IEEE Transactions on Electron Devices, June 1992, Vol.39, (no.6) pg. 1363-75

"Mechanical stability and adhesion of microstructures under capillary forces: part I: basic theory," C. H. Mastrangelo and C. H. Hsu, IEEE Journal of Microelectromechanical Systems, Vol. 2, pg. 33-43, March 1993.

"Mechanical stability and adhesion of microstructures under capillary forces: part II: experiments," C. H. Mastrangelo and C. H. Hsu, IEEE Journal of Microelectromechanical Systems, Vol. 2, pg. 44-55, March 1993.

"Adhesion release and yield enhancement of microstructures using pulsed Lorentz forces," B. P. Gogoi and C. H. Mastrangelo, IEEE Journal of Microelectromechanical Systems, Vol 4, pg. 185-192, Dec. 1995.

"Surface micromachined capacitive differential pressure sensor with lithographically-defined silicon diaphragm," C. H. Mastrangelo, X. Zhang, and W. C. Tang, IEEE Journal of Microelectromechanical Systems, Vol. 5, pg. 98-105, June 1996.

"1-D position sensitive single carrier semiconductor radiation detector," Z. He, G. F. Knoll, D. K. Wehe, R. Rojeski, C. H. Mastrangelo, M. Hamming, C. Barret, and A. Uritani, Nucl. Inst. Meth. Phys. Res., Vol A380, pg. 228-231, Oct 1, 1996.

"Microfabricated structures for DNA analysis," M. A. Burns, C. H. Mastrangelo, T. Sammarco, P. F. Man, J. R. Webster, B. Johnson, B. Foerster, D. K. Jones, E. Field, A. Kaiser, and D.T. Burke. Proc. Natl. Acad. Sci. USA, Vol. 93, pg. 5556-5561, 1996.

"Process compilation of thin film microdevices," M. Hasanuzzaman and C. H. Mastrangelo,IEEE Transactions on Computer Aided Design, Vol 15, pg. 745-763, 1996.

"Microfabrication technologies for integrated nucleic acid analysis," D. T. Burke, M. A. Burns, and C. H. Mastrangelo, Genome Research, Vol.7, pg. 189-202, March 1997.

"Elimination of post-release adhesion in microstructures using conformal fluorocarbon coatings," P. F. Man, B. P. Gogoi, and C. H. Mastrangelo, IEEE Journal of Microelectromechanical Systems, Vol. 6, pg. 25-34, March 1997.

"Adhesion related failure mechanisms in micromechanical devices," C. H. Mastrangelo, invited paper, Trib. Letters, Vol. 3, pg. 223-238, 1997.

"Electrophoretic separations using sweeping fields," F. Ying, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, Electrophoresis, Vol. 19, pg. 1388-1393, August 1998.

"Microfabricated devices for Genetic diagnostics," C. H. Mastrangelo, M. A. Burns, and D. T. Burke, invited paper, IEEE Proceedings, Vol. 86, pg. 1769-1787, August 1998.

"Statistical model for spatial correlation in thin film deposition and reactive growth," E. T. Carlen and C. H. Mastrangelo, IEEE Trans. Semic. Manufacturing, Vol. 11, pg. 511-521, August 1998.

"Automatic generation of thin film process flows: Part I: basic algorithms," M. H. Zaman, E. T. Carlen, and C. H. Mastrangelo, IEEE Trans. Semic. Manufacturing, Vol. 12, pg. 116-128, Feb. 1999.

"Automatic generation of thin film process flows: Part II: recipe generation, flow evaluation, and system framework," M. H. Zaman, E. T. Carlen, and C. H. Mastrangelo, > IEEE Trans. Semic. Manufacturing, Vol. 12, pg. 129-138, Feb. 1999.

"An integrated nanoliter DNA analysis device," M. A. Burns, B. N. Johnson, S. N. Brahmasandra, K. Handique, J. R. Webster, M. Krishnan, T. S. Sammarco, P. F. Man, D. K. Jones, D. Heldsinger, C. H. Mastrangelo, and D. T. Burke, Science, Vol. 282, pg. 484-487, 16 October 1998.

"Force balanced micromachined pressure sensors," B. P. Gogoi and C. H. Mastrangelo, Accepted, IEEE Trans. Electron Dev., Dec. 1999.

"Batch fabricated electrophoresis chips on polycarbonate substrates by surface micromachining," J. R. Webster, M. A. Burns, D. T. Burke, and C. H. Mastrangelo invited paper, Journal of Electrophoresis, to be printed March 2000.

"A CMOS uncooled heat-balancing infrared imager," C. C. Liu and C. H. Mastrangelo, IEEE J. Solid-State Circuits, Vol. 35, No. 4, pg. 527-535, April 2000.

"Electrophoresis System with Integrated On-Chip Fluorescence Detection," J. R. Webster, M. A. Burns, D. T. Burke, and C. H. Mastrangelo, Submitted to Analytical Chemistry, Jan. 2000.

"Contamination Insensitive Differential Capacitive Pressure Sensor" C.C. Wang, B.P. Gogoi, D.J. Monk, C.H. Mastrangelo, Submitted to IEEE Journal of Microelectromechanical Systems, May 2000.

Refereed Conference Papers

"Thermal conductivity of heavily doped LPCVD polysilicon," Y. C. Tai, C. H. Mastrangelo, and R. S. Muller, Int. Electron Devices Meeting (IEDM), Technical Digest, pp. 278-281, Washington, D.C., Dec. 6-9, 1987.

"A constant-temperature gas flowmeter with a silicon micromachined package," C. H. Mastrangelo and R. S. Muller, 1988 Solid State Sensor and Actuator Workshop, Tech. Digest (Hilton Head' 88), p. 43-47, June 1988.

"Thermophysical Properties of Low-residual Stress, Silicon-rich, LPCVD Silicon Nitride Films," C. H. Mastrangelo, Y. C. Tai, and R. S. Muller, 5th Int. Conf. on Solid-State Sensors and Actuators (Transducers '89), Montreux, Switzerland, June 25-30, 1989. p. 856-860, 1990.

"Vacuum-sealed silicon micromachined incandescent light source," C. H. Mastrangelo and R. S. Muller, Int. Electron Devices Meeting (IEDM) Technical Digest, p. 503-506, Washington D.C., 1989

"Design and performance of constant-temperature circuits for microbridge-sensor applications," C. H. Mastrangelo and R. S. Muller, 6th Int. Conf. on Solid-State Sensors and Actuators (Transducers '91), Technical Digest, p. 471-474, San Francisco, CA, 1991

"A thermal absolute pressure sensor with on-chip digital front-end processor," C. H. Mastrangelo and R. S. Muller, Int. Solid-State Circuit Conference (ISSCC) Technical Digest, p. 188-190, San Francisco, CA, 1991

"Fabrication and performance of a fully integrated micro-Pirani pressure gauge with digital readout," C. H. Mastrangelo and R. S. Muller, 6th Int. Conf. on Solid-State Sensors and Actuators (Transducers '91), Technical Digest, p. 245-248, San Francisco, CA, 1991

"A simple experimental technique for the measurement of the work of adhesion of microstructures," C. H. Mastrangelo and C. H. Hsu, 1992 Solid State Sensor and Actuator Workshop, Tech. Digest (Hilton Head' 92), p. 241-244, June 1992.

"A dry-release method based on polymer columns for microstructure fabrication," C. H. Mastrangelo and G. S. Saloka, 1993 IEEE Microelectromechanical Systems Conference (MEMS'93), pp. 77-81, February 1993.

K. Najafi and C. H. Mastrangelo, "Solid-state microsensors and smart structures," 1993 IEEE Ultrasonics Symposium, Baltimore, MD, October 1993, pp. 341-350; 1993.

"The automatic synthesis of planar fabrication process flows for surface micromachined devices," B. P. Gogoi, R. Yuen, and C. H. Mastrangelo, Proc. IEEE 1994 MEMS Conference, pg. 153-157, Oiso, Japan, Jan. 25-28 1994.

"Surface micromachined shock sensor for impact detection," P. F. Man and C. H. Mastrangelo, Tech. Dig. 1994 Solid-State Sensor and Actuator Workshop (Hilton Head'94), pg. 156-159, June 13-16 1994.

"Toward the automatic synthesis of process flows for semiconductor devices," R. Yuen, B. P. Gogoi, and C. H. Mastrangelo, Proc. International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD V), pg. 117-120, Honolulu, HI, June 5-6, 1994.

"Surface micromachined capacitive differential pressure sensor with lithographically-defined silicon diaphragm," C. H. Mastrangelo, X. Zhang, and W. C. Tang, Proc. 8th Intl. Conference Solid-State Sensors and Actuators (Transducers'95), pg. 612-615, Stockholm, Sweden, June 25-29, 1995

"MISTIC 1.1: A process compiler for micromachined devices," M. Hasanuzzaman and C. H. Mastrangelo, Proc. 8th Intl. Conference Solid-State Sensors and Actuators (Transducers'95), pg. 182-185, Stockholm, Sweden, June 25-29, 1995

"Post-processing release of microstructures by electromagnetic pulses," B. P. Gogoi and C. H. Mastrangelo, Proc. 8th Intl. Conference Solid-State Sensors and Actuators (Transducers'95), pg. 214-217, Stockholm, Sweden, June 25-29, 1995

"Elimination of post-release adhesion in microstructures using thin conformal fluorocarbon films," P. F. Man, B. P. Gogoi, and C. H. Mastrangelo, IEEE 1996 MEMS Conference, pg. 55-60, San Diego, CA, Feb 11-15 1996.

"Monolithic capillary gel electrophoresis stage with on-chip detection," J. R. Webster, D. K. Jones, and C. H. Mastrangelo, IEEE 1996 MEMS Conference, pg. 491-496, San Diego, CA, Feb 11-15 1996.

"A low-voltage force-balanced barometric pressure sensor," B. P. Gogoi and C. H. Mastrangelo, Tech. Dig. 1996 IEDM Conf., pg. 529-532, San Francisco, CA, Dec. 8-11, 1996.

"An ultrasensitive uncooled heat-balancing infrared detector," C. C. Liu and C. H. Mastrangelo, Tech. Dig. 1996 IEDM Conf., pg. 549-552, San Francisco, CA, Dec. 8-11, 1996.

"Microfluidic plastic capillaries on silicon substrates: A new inexpensive technology for bioanalysis chips," P. F. Man, D. K. Jones, and C. H. Mastrangelo, IEEE 1997 MEMS Conference, pg. 311-316, Nagoya, Japan, Feb. 1997.

"Large-volume integrated capillary electrophoresis stage fabricated using micromachining of plastics on silicon substrates," J. R. Webster and C. H. Mastrangelo, Proc. 9th Intl. Conference Solid-State Sensors and Actuators (Transducers'97), pg. 503-506, Chicago, IL, June 16-19, 1997.

"Experimental methodology for the estimation of spatially correlated parametric yield in thin film devices," E. T. Carlen and C. H. Mastrangelo, Tech. Dig. 1997 SISPAD Conference, pg. 45-48, Boston, MA, Sep. 8-10, 1997.

"Multiple zone inverse diffusion solver for silicon processing," Y. S. Wang and C. H. Mastrangelo, Tech. Dig. 1997 SISPAD Conference, pg. 241-245, Boston, MA, Sep. 8-10, 1997.

T. S. Sammarco, D. T. Burke, C. H. Mastrangelo, and M. A. Burns, "Thermocapillary pumping in microfabricated liquid analysis devices," Proc. 1997 Spring ACS Meeting, Vol. 76, pg. 547-548, 1997.

"Microfluidic plastic interconnects for multi-bioanalysis chip modules," P. F. Man, D. K. Jones, and C. H. Mastrangelo, Proc. SPIE Conf. Micromachined Devices, pg. 196-199, Austin, Texas, Sep. 29, 1997.

"Microfluidic flow control using selective hydrophobic patterning", K. Handique, B. P. Gogoi, D. T. Burke, C. H. Mastrangelo, and M. A. Burns, Proc. SPIE Conf. Micromachined Devices, pg. 185-195, Austin, Texas, Sep. 29, 1997.

"Statistical multi-lot characterization of spatial thickness variations in LPCVD oxide, nitride, polysilicon, and thermal oxide films," E. T. Carlen and C. H. Mastrangelo, Proc. SPIE Conf. Microelectronic Manuf. Yield, Reliability, and Failure Anal.", pg. 27-39, Austin, Texas, Oct. 1-2, 1997.

"High-sensitivity polysilicon diaphragm condenser microphone," P. C. Hsu, C. H. Mastrangelo, and K. D. Wise, IEEE MEMS'98 Conference, pg. 580-585, Heidelberg, Germany, Feb. 1998

"Microfabricated capillarity-driven stop valve and sample injector," P. F. Man, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, IEEE MEMS'98 Conference, pg. 45-50, Heidelberg, Germany, Feb. 1998

"Simulation of Electrothermal MOS Ciruits using Saber," C. C. Liu, E. T. Carlen, K. D. Wise, and C. H. Mastrangelo, in Proc. 1998 IEEE Microsystem Simulation Modeling Conference, (MSM-98), Santa Clara, CA, April 8-10, 1998.

"A Least Square Algorithm for Optimal Heater Placement in Microsensors," P. F. Man, C. C. Liu, and C. H. Mastrangelo, in Proc. 1998 IEEE Microsystem Simulation Modeling Conference, (MSM-98), Santa Clara, CA, April 8-10, 1998.

"Surface force induced failures in microelectromechanical systems," C. H. Mastrangelo, Tribology issues and Opportunities in MEMS, B. Bhushan, Ed., Kluwer, 1998. NSF/ASME Workshop, invited paper, pg. 367-395, Nov. 9-11, 1997, Columbus, OH.

"DNA analysis systems on a chip," C. H. Mastrangelo, invited paper, in Proc. 1998 International Ceramics Symposium (CIMTEC'98), Florence, Italy, June 1998.

"Nanoliter-volume discrete drop injection and pumping in microfabricated chemical analysis systems," K. Handique, D. T. Burke, C. H. Mastrangelo, and M. A. Burns, Tech. Dig. 1998 Solid-State Sensor and Actuator Workshop (Hilton Head'98), pg. 346-349, June 8-11 1998.

"Thin film microresonator for vacuum sensing," F. Yuan, C. L. Tom, C. H. Mastrangelo, J. Martin, and R. Pfenninger, in Proc. 1998 ASME Conference, Anaheim, pg. 241-246, Nov. 18, 1998.

"On-chip DNA band detection in microfabricated separation systems," S. N. Brahmasandra, B. N. Johnson, J. R. Webster, D. T. Burke, C. H. Mastrangelo, and M. A. Burns, in Proc. SPIE Microfluidic Dev. Sys. Conf., Vol 3515, pg. 242-251, Santa Clara, CA, Sept. 1998.

"Hydrophobic and hydrophilic texturing of surfaces using photolithographic photodeposition of polymers," D. K. Jones, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, in Proc. SPIE Microfluidic Dev. Sys. Conf., Vol. 3515, pg. 136-143, Santa Clara, CA, Sept. 1998.

"An inexpensive plastic technology for microfabricated capillary electrophoresis chips," J. R. Webster, C. H. Mastrangelo, M. A. Burns, and D. T. Burke, in Proc. Micro Total Chemical Analysis Systems (micro-TAS), Banff, Alberta, Canada, pg. 249-252, October 13-16, 1998.

S. N. Brahmasandra, J. R. Webster, D. T. Burke, C. H. Mastrangelo, and M. A. Burns, "Microfabricated fluidic reaction and separation system for integrated DNA analysis," in Proc. Micro Total Chemical Analysis Systems (micro-TAS), Banff, Alberta, Canada, pg. 267-270, October 13-16, 1998.

"Integrated Microfabricated Devices for Genetic Assays," C. H. Mastrangelo, M. A. Burns and D. T. Burke, invited paper, Microprocessor and Nanotechnology Conference, Yokohama Japan, pg. 58-59, July 6-8, 1999

"A low voltage force balanced pressure sensor with hermetically sealed servomechanism," B. P. Gogoi and C. H. Mastrangelo, in IEEE MEMS'99 Conference, pg. 493-498, Orlando, Florida, Jan. 1999

"Simple, High-Actuation Power Thermally Activated Paraffin Microactuator," E. T. Carlen and C. H. Mastrangelo, pg. 1364-1367, Transducers 99, Sendai, Japan, June 7-10, 1999.

"Microfabricated plastic capillary systems with patternable hydrophilic and hydrophobic regions," P. F. Man, M. A. Burns, D. T. Burke, and C. H. Mastrangelo, pg. 738-741,Transducers 99, Sendai, Japan, June 7-10, 1999.

"Microchips for DNA sequencing", C. H. Mastrangelo, P. Sethu, M. A. Burns, and D. T. Burke, invited paper, SPIE Microfluidics Conference, Vol. 3877, pg. 82-87, September 21, 1999.

"A Micropower Microphone and Sound Recognition Chip," Pang-Cheng Hsu and C. H. Mastrangelo, Proceedings of Vehicular Applications of Displays and Microsensors'99, pg. 145-151, September 22-23, 1999.

"Suppression of stiction in MEMS," C. H. Mastrangelo, invited paper, 1999 Spring MRS Meeting, Boston, MA, Dec 1999.

"Paraffin Actuated Surface Micromachined Valve," E. T. Carlen and C. H. Mastrangelo, in IEEE MEMS 2000 Conference, pg. 381-385, Miyazaki, Japan, Jan. 2000

"Contamination Insensitive Differential Capacitive Pressure Sensor" C.C. Wang, B.P. Gogoi, D.J. Monk, C.H. Mastrangelo, in IEEE MEMS 2000 Conference, pg. 551-555, Miyazaki, Japan, Jan. 2000.

"Electrophoresis System with Integrated On-Chip Fluorescence Detection," J. R. Webster, M. A. Burns, D. T. Burke, and C. H. Mastrangelo, IEEE MEMS 2000 Conference, pg. 306-310, Miyazaki, Japan, Jan. 2000.

"A Miniaturized and Integrated Plastic Chemical Reactor for Genetic Analysis," Huinan Yu*, Palaniappan Sethu, Tony Chan*, Natalia Kroutchinina*, Jocquese Blackwell*, Carlos H. Mastrangelo, and Piotr Grodzinski*, Micro Total Analysis Systems 2000 Conference, Enschede, Netherlands, pg. 545-548, May 14-18, 2000 (* Motorola, Physical Science Research Lab., Phoenix, AZ)

"Fabrication of Genetic Analysis Microsystems using Plastic Microcasting," P. Sethu, H. Yu, P. Grodzinski, and C. H. Mastrangelo, to be presented Hilton Head 2000, Solid-State Sensor & Actuator Workshop, June 4-8, 2000.

Other Conference Papers

"Overview of MEMS activities in the U.S.," C. H. Mastrangelo, invited paper, in Proc. 1996 SEMI Micromachine Seminar, pg. 17-26, Tokyo, Japan, Dec. 1996.

C. H. Mastrangelo, "Microfluidics at Michigan," invited presentation, AIAA Space Technology Conference and Exposition in Albuquerque, NM, 28-30 September, 1999.

C. H. Mastrangelo, P. Sethu, M. A. Burns, and D. T. Burke, "Microchips for DNA Sequencing," invited presentation at the 1999 Nanotech Conference, Montreaux, Switzerland, Dec 1999.

Book Chapters

C. H. Mastrangelo and W. C. Tang, "Semiconductor sensor technologies," Chap. 2, pg. 17-96, in Semiconductor Sensors, S. M. Sze, Ed., Wiley 1994.

Lab Contact Information

MEB
50 S Central Campus Dr
Rm 2254
Salt Lake City, UT 84112
Phone: 801-587-7587
Email
 
Last Updated: 3/14/13