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The Nano Institute of Utah
Co-Director, Nano Institute of Utah; Director, Nano and Microfabrication Laboratory; Associate Professor, MEMS, Microsensors, and Actuators, Department of Electrical & Computer Engineering; Adjunct Associate Professor, Departments of Materials Science & Engineering and Bioengineering
Besides working as a general MEMS service provider for on and off campus partners, Florian Solzbacher’s core focus in research is in Harsh Environment MEMS, i.e. materials (SiC [on Si], SOI, GaN), metallisation systems for high temperatures and aggressive ambient conditions, and silicon fusion bonding and packaging issues. The current objective is to team up with industrial partners who will set the specifications and test conditions (and carry out some of the tests) while working towards a better understanding and subsequently better properties on materials together with partners in the USA and Europe.